The complete SEM Scintillator detector system - Backscattered Electron, Cathodoluminescence and STEM
CENTAURUS is a new style of Detector. It was originally designed as a Backscattered Detector, a function that is performs particularly well in both Compositional and topographic modes. Due to its versatile construction, with a quickly removable tip, it may be converted in seconds to a Cathodoluminescence Detector or to a STEM Detector.
This gives the user two additional functions at little extra cost.
CENTAURUS is so versatile. That is why we call it The Complete Detector System!
Standard Backscatter Tip
CENTAURUS uses a new design of scintillator detector (patented). This design gives high sensitivity, particularly at low kVs and therefore the scintillator element may be made quite small whilst still achieving excellent results. Its low kV performance makes imaging possible down to 0.5KeV. This is considerably lower than most users will ever require. However, its main low kV applications will be around 1.5kV. This is the point where normal charging problems virtually disappear.
CENTAURUS may therefore be used for imaging totally uncoated specimens with little risk of charging. This low kV operation is particularly important for beam sensitive specimens such as semiconductors which may be damaged by the use of higher voltages.
CENTAURUS is also very efficient at high kVs. Its tip, only 4mm in thickness, allows a very short working distance to be used. This in turn helps achieve high resolution images.
The shape of its tip virtually overcomes the usual problems of other scintillator detectors where the image seen is a mixture of both compositional and topography. The topographic content has been almost eliminated but by partially retracting the detector the topographic image may be obtained. A Topo latch is provided to hols the detector in the partially retracted position
CENTAURUS has produced excellent results in FE SEMs, where high resolution is paramount. Its high sensitivity gives low noise pictures at very small probe currents.
It has also had great success in “Environmental” or “Low Vacuum” SEMs. In these, the electrons leaving the specimen are significantly retarded by their collisions with gas molecules giving them much lower energies. The low kV ability of CENTAURUS is a great help in resolving them.